PTCEC340 MEMS Design Syllabus:

PTCEC340 MEMS Design Syllabus – Anna University Part time Regulation 2023

COURSE OBJECTIVES:

 To understand the basic electrical and mechanical concepts of MEMS design
 To understand the design aspects of electrostatic sensors and actuators
 To understand the design aspects of thermal sensors and actuators
 To understand the design aspects of piezoelectric sensors and actuators
 To understand the design aspects of magnetic sensors and actuators

UNIT I ESSENTIAL ELECTRIC AND MECHANICAL CONCEPTS

Conductivity of semiconductors, Crystal planes and orientations, stress and strain, flexural beam bending analysis under simple loading conditions, Dynamic system, resonant frequency and quality factor

UNIT II ELECTRO STATIC SESNING AND ACTUATION

Parallel plate capacitor, Applications of parallel plate capacitors- inertial sensor, pressure sensor, flow sensor, tactile sensor, parallel plate actuators, interdigitated finger capacitors, applications of comb drive devices.

UNIT III THERMAL SENSING AND ACTUATION

Fundamentals of thermal transfer, Sensors and actuators based on thermal expansion, Themal couples, Thermal resistors, Applications- Infrared sensors, flow sensors, Inertial sensors, other sensors

UNIT IV PIEZOELECTRIC SENSING AND ACTUATION

Mathematical description of piezoelectric effects, Cantilever piezoelectric actuator model, properties of piezoelectric materials –Quartz, PZT,PVDF, ZnO , Applications – Acoustic sensors, Tactile sensors

UNIT V MAGNETIC SENSING AND ACTUATION

Concepts and principles- magnetization and nomenclatures, principles of micromagnetic actuators, fabrication of micro magnetic components- deposition, design and fabrication of magnetic coil, MEMS magnetic actuators

30 PERIODS
PRACTICAL EXERCISES: 30 PERIODS

1. Design and simulation of piezoelectric cantilever
2. Design and simulation of thermo couples
3. Design and simulation of comb drive actuators

COURSE OUTCOMES:

Upon completion of this course, the students will be able to
CO1: Understand the basics of MEMS design aspects.
CO2: Apply the knowledge in the development of electro static sensors and actuators.
CO3: Apply the knowledge in the development of thermal sensors and actuators.
CO4: Apply the knowledge in the development of piezoelectric sensors and actuators.
CO5: Apply the knowledge in the development of magnetic sensors and actuators.

TOTAL:60PERIODS
TEXTBOOKS

1.Chang Liu, “Foundations of MEMS”, Pearson education India limited, 2006

REFERENCES

1. Murty B.S, Shankar P, Raj B, Rath, B.B, Murday J, Textbook of Nanoscience and Nanotechnology, Springer publishing, 2013.
2. Sergey Edward Lyshevski, “MEMS and NEMS: Systems, Devices, and Structures”, CRC Press, 2002
3. Tai Ran Hsu, MEMS and Microsystems Design and Manufacture, Tata Mcgraw Hill, 2002
4. Vinod Kumar Khanna Nanosensors: Physical, Chemical, and Biological, CRC press,2012.