PR3004 Micromachining and Fabrication Syllabus:
PR3004 Micromachining and Fabrication Syllabus – Anna University Regulation 2021
COURSE OBJECTIVES:
• To educate on mechanism of machining in micro and nano level based on molecular dynamics.
• To introduce to various methods of micro fabrication based on material addition.
• To introduce to various methods of micromachining with aid of high-rate energy input.
• To introduce to micromachining processes based on abrasive flow and enhanced rheology.
• To introduce the concepts of hybrid machining for high material removal and surface finish.
UNIT I INTRODUCTION
Introduction to micromachining process – Classification of micromachining and nanomachining processes – Molecular dynamics (MD), principle of molecular dynamics simulation potential energy function – Boundary condition – MD simulation procedure.
UNIT II MICROFABRICATION METHODS
Methods of microfabrication – Electro deposition, Chemical vapour deposition, physical vapour deposition – Electro Chemical spark deposition – LIGA (Lithographie, Galvanoformung, Abformung) processStereolithography- Micro Moulding
UNIT III MECHANICAL MICROMACHINING
Ultrasonic machining – Abrasive jet machining – Abrasive water jet machining, water jet machining – Beam energy micromachining – Electron beam machining, Electro discharge machining, Ion beam machining, Focused ion beam machining.
UNIT IV MICROMACHINING AND NANO FUNCTIONING WITH ABRASIVE FLOW
Process principle and description – Process Technology Selection of machine Effect of process parameter on performance – Mechanism of materials removal Magneto Rheological Nano functioning Process. Nano functioning – Smart Rheological fluids – Magneto Rheological polishing fluid – Rheological characteristics of MR fluid – MR Abrasive Flow Finishing Process – MR Jet Finishing technology.
UNIT V HYBRID MICRO MACHINING
Surface Integrity of Machined Surface-Chemical Mechanical polishing – Electro chemical spark micro machining – Electro discharge grinding – Electrolytic in process dressing – Laser and Ultrasonic aided Machining – High/Low temperature aided Machining – Application.
TOTAL: 45 PERIODS
COURSE OUTCOMES:
Upon successful completion of the course, students should be able to:
CO1: Understand on the molecular dynamic mechanism in micro-nano machining.
CO2: Familiarize on various methods of microfabrication based on material addition.
CO3: Get the Overview of various methods of micromachining with aid of high-rate energy input.
CO4: Acquire Knowledge on micromachining processes based on rheology of abrasive medium.
CO5: Realize hybrid machining for better material removal and surface finish.
TEXT BOOKS:
1. Jain. V. K, “Introduction to Micromachining”, 2nd edition, Narrosa Publishing house, 2018.
2. Marc Madou, “Fundamentals of Microfabrication”, 3rd Edition, CRC Press, 2011.
REFERENCES:
1. Jain V.K., “Advanced machining process”, Allied Publisher, Delhi, 2002.
2. Mohammed Gad-el-Hat, “The MEMS Hand book”, 2nd edition, CRC Press, 2006.
3. Sami Franssito, “Introduction to Micro fabrication”, 2nd edition, John Wiley and sons, 2010.
4. MojtabaKahrizi, “Micromachining Techniques for Fabrication of Micro and Nano Structures”, InTech, 2012.
5. 5. Ja Mc Geogh, “Micro Machining of Engineering Materials”, CRC Press, 2001.