ML3018 Mems and Nanotechnology Syllabus:
ML3018 Mems and Nanotechnology Syllabus – Anna University Regulation 2021
COURSE OBJECTIVES:
The main learning objectives of this course is to prepare the students for:
1. Acquiring knowledge about the materials used in MEMS.
2. Understanding the basics of nanoelectromechanical systems (NEMS)
3. Developing the skills to utilize MEMS devices in the real-time applications.
4. Familiarizing with microdevices.
5. Identifying suitable micro and nano electromechanical systems for a given application.
UNIT – I MATERIAL ASPECTS OF MEMS AND NEMS
Overview of MEMS and NEMS. Material Aspects – Silicon and its compounds – Thin metal films – semiconductor – optical properties – Polymers – Smart materials.
UNIT – II SENSORS
MEMS Sensors– Mechanical Sensors– Thermal Sensors– Magnetic Sensors – Micro-opto electromechanical Systems – Radio Frequency (RF) MEMS. Microfluidic Systems; Chemical and Biomedical Microsystems.
UNIT – III ACTUATORS
MEMS Actuators – Mechanical Actuators – Thermal Actuators – Magnetic Actuators – Micro-opto electromechanical Systems – Radio Frequency (RF) MEMS. Microfluidic Systems; Chemical and Biomedical Microsystems.
UNIT – IV MEMS AND NEMS APPLICATIONS – I
Applications in Computer industry – Making of ICs and Microprocessors – Data storage devices. Automobile – Safety and Stability Control. Health care
UNIT – V MEMS AND NEMS APPLICATIONS – II
Lab-on-a-Chip. Consumer Products; Micro reactor; Micro-bots; MOEMS; Molecular machines. Applications of NEMS
TOTAL: 45 PERIODS
COURSE OUTCOMES:
Upon completion of this course, the students will be able to:
1. Select suitable material for MEMS and Microsystems,
2. Explain the scaling laws involved in miniaturization.
3. Apply the working principle of electrostatic based MEMS sensors and actuators in the design of MEMS devices.
4. Apply the working principle of thermal based MEMS sensors and actuators in the design of MEMS devices.
5. Design the elements of Micro-fluidic systems, and select suitable MEMS devices for Industrial applications.
TEXT BOOKS:
1. Mark A. Ratner and Daniel Ratner, “Nanotechnology: A Gentle Introduction to the Next Big Idea, Pearson, 2003.
2. Tai-Ran Hsu, “MEMS and Micro systems Design and Manufacture”, McGraw Hill Education, 2015.
REFERENCES:
1. Bharat Bhushan, “Handbook of Nanotechnology”, Springer, 2006.
2. Marc Madou, “Fundamentals of Microfabrication”, CRC Press, 2002.
3. Stephen D Senturia, “Microsystem Design”, Kluwer Academic Publishers, 2002.