CBM334 BIO MEMS Syllabus:
CBM334 BIO MEMS Syllabus – Anna University Regulation 2021
COURSE OBJECTIVES
The objective of this course is to enable the student to
● Provide knowledge of semiconductors and solid mechanics to fabricate MEMS devices.
● Understand various mechanical and thermal sensors and actuators and their principles of operation at the micro scale level.
● Understand various electrostatic and piezoelectric sensors and actuators at the micro scale level.
● Introduce microfluidic systems.
● Know on the applications of MEMS in different field of medicine.
UNIT I MEMS MATERIALS AND FABRICATION
Semiconductor materials; photo lithography; doping; thin film growth and deposition; CVD and Ion Implantation, metallization; wet and dry etching; silicon micromachining; metal MEMS processes; submicron optical lithography; electron beam lithography; soft lithography and printing.
UNIT II MECHANICAL AND THERMAL SENSORS AND ACTUATORS
Mechanical sensors and actuators – beam and cantilever –microplates, strain, pressure and flow measurements, Thermal sensors and actuators- actuator based on thermal expansion, thermal couples, thermal resistor, Shape memory alloys- Inertia sensor, flowsensor.
UNIT III ELECTROSTATIC AND PIEZOELECTRIC SENSORS AND ACTUATOR
Electrostatic sensors and actuators- Inertia sensor, Pressure sensor, flow sensor, tactile sensor, comb drive. Piezoelectric sensor and actuator – inchworm motor, inertia sensor, flow sensor.
UNIT IV MICROFLUIDIC SYSTEMS
Laminar flow in circular conduits, fluid flow in micro conduits, in submicrometer and nanoscale. microfluidic components (filters, mixers, valves, and pumps)
UNIT V APPLICATIONS OF BIOMEMS
CAD for MEMS,DNA sensor, MEMS based drug delivery, Biosensors- sensors for glucose, uric acid, urea and triglyceride sensor. Introduction to the MATLAB/Simulink/ CAD tool for modelling/simulations of bioelectronics systems.
TOTAL: 30 Theory+15 lab PERIODS
LABORATORY EXPERIMENTS
1. Modeling and Simulation of MEMS sensors Using MATLAB (SIMULINK) such as Accelerometer, Current and Voltage Sensor.
2. Design of 3D CAD of BIOMEMS sensors.
3. Analysis of 3D CAD of BIOMEMS sensor.
COURSE OUTCOMES
On successful completion of this course, the student will be able to
CO1: Summarize various MEMS fabrication techniques.
CO2: Elucidate different types of mechanical and thermal sensors and actuators and their principles of operation at the micro Scale level.
CO3: Describe different types of various electrostatic and piezoelectric sensors and actuators and their principles of operation at the micro Scale level.
CO4: Explain microfluidic systems
CO5: Illustrate MEMS in different field of medicine.
TEXT BOOKS:
1. TaiRan Hsu,MEMS and Microsystems Design and Manufacture, Tata McGrawHill Publishing Company, New Delhi, 2017.
2. WanjunWang and Stephen A.Soper, BioMEMS:Technologies and Applications, CRC Press, NewYork, 2007.
3. Chang Liu, Foundations of MEMS, Pearson Education International, New Jersey, USA, 2011.
4. Ellis Meng, Biomedical Microsystems, CRC Press, Boca Raton, FL, 2011.
5. P. Tabeling, S .Chen, Introduction to microfluidics, Oxford University Press, 2010.
6. Alok Pandya ,Vijai Singh, Micro/Nanofluidics and Lab-on-Chip Based Emerging Technologies for Biomedical and Translational Research Applications – Part B, Academic Press, 2022