PTEE3023 MEMS and NEMS Syllabus:

PTEE3023 MEMS and NEMS Syllabus – Anna University Part time Regulation 2023

COURSE OBJECTIVES:

 To introduce the diverse technological and functional approaches of MEMS/NEMS and applications.
 To understand the microstructures and fabrication methods.
 To provide an insight of micro and nano sensors, actuators.
 To emphasis the need for NEMS technology.
 To update the ongoing trends and real time applications of MEMS and NEMS technology.

UNIT I INTRODUCTION TO MEMS and NEMS

Overview of Micro electro mechanical systems and Nano Electro mechanical systems, devices and technologies, Laws of scaling- Materials for MEMS and NEMS – Applications of MEMS and NEMS.

UNIT II MICRO-MACHINING AND MICROFABRICATION TECHNIQUES

Photolithography- Micro manufacturing, Bulk micro machining, surface micro machining, LIGA.

UNIT III MICRO SENSORS AND MICRO ACTUATORS

Micromachining : Capactive Sensors- Piezoresistive Sensors- Piezoelectric actuators.

UNIT IV NEMS TECHNOLOGY

Atomic scale precision engineering- Nano Fabrication techniques – NEMS for sensors and actuators.

UNIT V MEMS and NEMS APPLICATION

Bio MEMS- Optical NEMS- Micro motors- Smart Sensors – Recent trends in MEMS and NEMS.

30 PERIODS
LAB COMPONENTS: 30 PERIODS

1. Laboratory experiment: Simulation of MEMS sensors and actuators using Multi physics tool
a) Simulation of a typical piezo resistive sensor
b) Simulation of a typical Piezoelectric actuator
c) Simulation study of a bio sensor
d) Simulation study of a micro motor
2. Assignment: Role of MEMS AND NEMS devices for Industry Standard 5.0.
3. Mini project : Design and analysis of any MEMS/NEMS device using multi physics tool.

TOTAL: 30+30 = 60 PERIODS
COURSE OUTCOMES:

At the end of this course, the students will have the ability to
CO1: Explain the material properties and the significance of MEMS and NEMS for industrial automation.
CO2: Demonstrate knowledge delivery on micromachining and micro fabrication.
CO3: Apply the fabrication mechanism for MEMS sensor and actuators.
CO4: Apply the concepts of MEMS and NEMS to models ,simulate and process the sensors and actuators.
CO5: Improved Employability and entrepreneurship capacity due to knowledge up gradation on MEMS and NEMS technology.

TEXTBOOKS:

1. Chang Liu, “Foundations of MEMS”, Pearson International Edition, 2011, 2nd Edition.
2. Tai-.Ran Hsu, “MEMS and Microsystems: design , manufacture, and Nanoscale”- 2nd Edition, John Wiley & Sons, Inc., Hoboken, New Jersey, 2008.
3. Lyshevski, S.E. “ Nano- and Micro-Electromechanical Systems: Fundamentals of Nano-and Microengineering “ (2nd ed.). CRC Press,2005.
4. Julian W Gardner and Vijay K Varadan, “ Microsensors, MEMS and Smart Devices”, John Wiley and Sons Ltd, 2001, 1st Edition.

REFERENCES:

1. Marc F madou“ Fundamentals of micro fabrication” CRC Press 2002 2nd Edition Marc Madou.
2. M.H.Bao “Micromechanical transducers :Pressure sensors, accelerometers and gyroscopes”,Elsevier, Newyork, 16 Oct 2000, 1st Edition.
3. Maluf, Nadim “An introduction to Micro Electro-mechanical Systems Engineering “AR Tech house, Boston, June 30 2004, 2nd Edition.
4. Mohamed Gad – el – Hak “MEMS Handbook” Edited CRC Press 2001, 1st Edition.