ML3019 Micro and Nano Fabrication Syllabus:
ML3019 Micro and Nano Fabrication Syllabus – Anna University Regulation 2021
COURSE OBJECTIVES:
The main learning objectives of this course is to prepare the students for:
1. Getting acquainted with the developments in microfabrication process engineering
2. Getting an insight about the microfabrication technologies.
3. Gaining a comprehensive knowledge on micromanufacturing methods.
4. Understanding the basics of the thin film deposition processes
5. Discuss on the scaling laws and their influences on process and design selection
UNIT – I INTRODUCTION
Review of early developments in Microfabrication Process Engineering, Introduction to Material Science for device fabrication
UNIT – II MANUFACTURING PROCESSES
Hot Processing and Ion implantation – Diffusion, Thermal Oxidation, Ion implantation, Rapid Thermal Processing. Pattern Transfer
UNIT – III LITHOGRAPHY
Photolithography, Extreme UV lithography, X-ray Lithography, Electron Beam lithography Focused ion beam Lithography, nanoimprint.
UNIT – IV THIN FILM DEPOSITION TECHNIQUES
Thin film deposition – Physical deposition: Evaporation and sputtering – Chemical Vapour Deposition – Epitaxial growth. Surface Micromachining of silicon
UNIT – V MICROMANUFACTURING PROCESSES
Etching – Isotropic etching – Anisotropic etching – Deep Reactive ion etching (DRIE). Surface micromachining, Bulk Micro-manufacturing, LIGA Process. Scaling laws and their influences on process and design selection
TOTAL: 45 PERIODS
COURSE OUTCOMES:
Upon completion of this course, the students will be able to:
1. Select suitable material for MEMS and Microsystems, and explain the scaling laws involved in miniaturization.
2. Explain the various micro-manufacturing processes.
3. Discuss on the various lithography techniques
4. Describe the working principles of various thin film deposition techniques
5. Explain the method of etching, surface and bulk micro manufacturing methods
TEXT BOOKS:
1. Stephen A.Campbell, “Fabrication Engineering at the micro and nano scale”, Oxford University Press, 4th edition, 2013.
2. Maria Stepanova and Stephen Dew, “Nanofabrication: Techniques and Principles”, Springer, 2011
REFERENCES:
1. Bharat Bhushan, “Handbook of Nanotechnology”, Springer, 2006.
2. Marc Madou, “Fundamentals of Microfabrication”, CRC Press, 2002
3. Stephen D Senturia, “Microsystem Design”, Kluwer Academic Publishers, 2002.