CRA333 Microrobotics Syllabus:

CRA333 Microrobotics Syllabus – Anna University Regulation 2021

COURSE OBJECTIVES:

1. To expose students to the fundamental aspects of the emerging field of micro robotics.
2. To expose students to micro scale, technologies for fabricating small devices, bioinspired design, and applications of the field.
3. To expose students to various Mathematical formalism for flexures, Electrostatic actuators, Piezo-electric actuators, Magneto-strictive actuator and other sensors.
4. To apply micro robotics to various applications
5. To engage students in implementation of microrobotics

UNIT – I INTRODUCTION TO MICROROBOTICS

Introduction to Micro robotics -MST (Micro System Technology) – Micromachining – Working principles of Microsystems Applications of Microsystems – Micro-fabrication principles-Design selection criteria for micromachining – Packaging and Integration aspects – Micro-assembly platforms and manipulators

UNIT – II SCALING LAWS AND MATERIALS FOR MEMS

Introduction – Scaling laws – Scaling effect on physical properties scaling effects on Electrical properties – scaling effect on physical forces – Physics of Adhesion – Silicon – compatible material system – Shape memory alloys – Material properties – Piezoresistivity, Piezoelectricity and Thermoelectricity

UNIT – III FLEXURES, ACTUATORS AND SENSORS

Elemental flexures – Flexure systems – Mathematical formalism for flexures – Electrostatic actuators – Piezo-electric actuators – Magneto-strictive actuators – Electromagnetic sensors – Optical-based displacement sensors – Motion tracking with microscopes

UNIT – IV MICROROBOTICS

Introduction – Task specific definition of micro-robots – Size and Fabrication Technology based definition of micro- robots – Mobility and Functional-based definition of micro-robots – Applications for MEMS based micro-robots.

UNIT – V IMPLEMENTATION OF MICROROBOTS

Arrayed actuator principles for micro-robotic applications – Micro-robotic actuators- Design of locomotive micro-robot devices based on arrayed actuators – Micro-robotics devices – Microgrippers and other micro-tools – Micro-conveyors – Walking MEMS Micro-robots – Multi-robot system: Micro-robot powering, Micro-robot communication.

TOTAL: 45 PERIODS

COURSE OUTCOMES

The Student will be able to
CO1: Explain and apply the concepts of mass, energy, and momentum balance in microrobotics.
CO2: Apply adapt, and synthesize learned engineering skills to create microrobot.
CO3: Modelmicrorobots for different robotics applications
CO4: Formulate the specifications and design of mechatronic systems.
CO5: Program the Microrobot for different robotics applications

TEXT BOOKS:

1. Mohamed Gad-el-Hak , “The MEMS Handbook”, 2nd Edition, CRC Press, New York, 2019.
2. Yves Bellouard, “Microrobotics Methods and Applications”, CRC Press, Massachusetts, 2019.

REFERENCES:

1. NadimMaluf and KirtWilliams, “An Introduction to Microelectromechanical systems Engineering”, 2nd edition, Artech House, 2004.
2. Julian W Gardner, “Microsensors: Principles and Applications”, 2nd edition, Wiley, 2007.
3. MetinSitti, “Mobile Microrobotics”, MIT Press, 2017.
4. Nicolas Chaillet, Stephane Rangier,”Microrobotics for Micromanipulation”, John Wiley & Sons, 2013.