ML3003 Electron Microscopy Syllabus:
ML3003 Electron Microscopy Syllabus – Anna University Regulation 2021
COURSE OBJECTIVES:
The main learning objective of this course is to prepare the students for
1. Acquiring knowledge on the basic concepts of interaction of electron beam and material interaction
2. Gaining knowledge on Scanning electron microscopy
3. Understanding and analysing the transmission electron microscopic images
4. Getting familiarised with the advanced electron microscopic techniques
5. Acquiring knowledge on the electron diffraction patterns and stereo graphic projection
UNIT- I ELECTRON BEAM AND MATERIAL INTERACTION
Electron gun – types – thermo-emission and field emission – electromagnetic and magnetic lens – aberration – corrections – electron material interaction – elastic and inelastic – signals – escape depth
UNIT-II SCANNING ELECTRON MICROSCOPY
Imaging modes – resolution – depth of field and depth of focus – contrast – number contrast – compositional contrast – Influence of process parameters on image fractography- applications
UNIT-III TRANSMISSION ELECTRON MICROSCOPY
Instrumentation – Sample preparation – Mass thickness contrast – diffraction contrast- phase contrast – High resolution TEM- Crystal defects – applications
UNIT-IV ELECTRON DIFFRACTION
Reciprocal lattice- Stereographic projection – Selected Area Electron Diffraction – Zone axis, indexing – Structure Factor – Typical patterns of BCC, FCC and HCP – Kikuchi pattern – SEM – Orientation Imaging – Electron Backscattered Diffraction (EBSD).
UNIT-V ADVANCED ELECTRON MICROSCOPY
Field ion microscopy (FIB), Low Energy Electron Diffraction (LEED), Reflection High Energy Electron Diffraction (RHEED).
TOTAL : 45 PERIODS
COURSE OUTCOMES:
Upon Completion of the course, the students will be able to
1. Explain the interaction between electron beam and materials
2. Interpret the images obtained from scanning electron microscopy
3. Discuss on the working principle of transmission electron microscopy
4. Identify the electron diffraction patterns and interpret them
5. Describe the different advanced electron microscopic techniques
TEXT BOOKS
1. Peter J. Goodhew, John Humphreys, Richard Beanland, “Electron Microscopy and Analysis”, 3rd Edition, Taylor and Fransis, II New Fetter Lane, London, 2001.
2. David B. Williams and C. Barry Carter, “Transmission Electron Microscopy: A Text Book for Materials Science”, Publisher: Springer, USA, 2009.
REFERENCES
1. J. W. Edington, “Electron Diffraction in the Electron Microscope”, N. V. Philips’ Gloeilampenfabrieken, Eindhoven, 1975.
2. Joseph Goldstein, Dale Newbury, David Joy, et al., “Scanning Electron Microscopy and X-ray Microanalysis”, Kluwer Academic / Plenum Publishers, New York, 2003.
3. Marc De Graef, “Introduction to Conventional Transmission Electron Microscopy”, Cambridge University Press, UK, 2003.